使用子孔径拼接法检测大口径光学元件

Testing the large aperture optical components by the stitching interferometer

为了解决大口径光学元件检测过程中成本高、空间分辨率低这两个主要难点 ,提出了使用小口径、高精度干涉仪分次检测大口径元件 ,然后通过优化算法将检测结果进行拼接处理 ,最终得到原大口径元件波前信息的方法 ,并作了初步的拼接模拟实验 ,确认了这一方案的可行性。

This paper describes a new method to solve the two main difficulties including high cost and low resolving power in the large aperture optical testing process. A small aperture and high precision interferometer, called the sub-aperture was used to recover the large optical component phase information. The principle and the optimizing way of the stitching interferometer were introduced and several simulation experiments were made to affirm the feasibility of this test scheme.