大口径高精度方形平面光学元部件的研制

Research of fabricating large quadrate high-precision plane optical elments

采用环行抛光技术是实现大尺寸、高面形精度和细表面粗糙度要求的方形或长方形平面元件批量化加工的一条有效途径。介绍了利用环行抛光工艺实际制作了两块 32 0mm× 32 0mm× 35mm和 32 0mm× 32 0mm× 48mmUBK7材料的工艺实验样品。加工结果是 ,透射元件获得了镀膜后双次透射波前 0 2 93λ(P V ,λ =0 632 8um )和反射元部件的反射波前 0 2 2λ(P V ,λ =0 632 8um )的结果。

It's a valid means to fabricate large quadrate or rectangle high-precision plane optical elments using annular lapping technology. In this paper, we manufacture 320mm×320mm×35mm and 320mm×320mm×48mm UBK7 optical elements with 2 meter annular lapping machines,and the transmission wavefront after coating for 320mm×320mm×35mm is 0.293λ(P-V,λ=0.6328μm),the reflect wavefront after coating for 320mm×320mm×48mm is 0.22λ(P-V,λ=0.6328μm).