CGQ-II车间数字干涉仪的几种特殊检测的应用

Application of CQG-Ⅱ shop digital interferometer in several special testing cases

最近研制与改进的几台CQG II型车间数字干涉仪除应用于平面及球面的面形测量、获得面形误差PV、RMS或N、ΔN外 ,还可以广泛地应用于下列几种特殊的应用 :( 1)微型光学件的检测 :借助 φ60mm～φ15mm放大系统可以测量 φ1mm平面 ;( 2 )光学平行平面的透过波面畸变检测 ;( 3)棱镜角度及面形检测 ;( 4)非球面检测 :低陡度非球面、二次曲面及非球面准直系统 ;( 5 )衍射光检测 ;( 6)镜头的调制传递函数 (MTF)的检测 ;( 7)金属表面 (模具 )或镀反射膜光学件的检测。仪器的口径为 60mm ,平面精度为λ/2 0 ,球面精度为λ/10 ,λ =632 8nm ,对以上的应用均列举了生产实际应用或科研应用的实例。

Recently We have developed CQG-II shop digital interferometer, which can not only be used for testing of plane surface or spherical surface with parameter of PV, RMS, N and ΔN, but also for testing of other optical components. This paper describes its application in several special testing cases:(1) Testing of micro-optical components, which can be implemented by using φ60mm～φ15mm optical enlarge system for testing of φmm flat; (2) Testing of transmitted wavefront distortion for optical parallel flat; (3) Testing of prism angle and its surface; (4) Testing of aspheric surface, such as aspheric having small deviation from sphere, conicoid and aspheric collimated system; (5) Testing of diffracted wavefront for diffractive grating; (6) Testing of modulation transfer function (MTF) for lenses. (7) Testing of metal surface of mould and coated optics with high reflectivity. Furthermore, the paper gives detailed examples of its application in practical optical fabrication and research, and demonstrates that our interferometer can be used for testing of optics with aperture less than 60mm with accuracy of λ/20 for flat and λ/10 for sphere (λ=632.8mm).