摘要
提出了基于相干波面光强分布的静态干涉图数字处理的新方法 ,即在CQG Ⅱ型激光数字波面干涉仪上通过分别微调参考镜和被测镜的倾斜量 ,在CCD探测器上获得形成静态干涉图的两幅相干波面光强分布图 ,利用这两幅光强分布图与它们所形成的干涉图 ,可高精度地完成静态干涉图的数字分析。利用相干原理 ,给出了实现该方法的基本过程 ,并编程实现了该数字分析 ,获得了实验测量结果。通过与相移测量结果相比较 ,验证该方法对口径为 60mm的平面有望达到的测量精度。
New algorithm for digital analysis of static interferogram based on coherent wavefront intensity distribution has been presented. The two coherent wavefront intensity distributions, which can be imaged to the CCD sensor by precisely adjusting the tilt of the reference plate and the tested mirror respectively on CQG-Ⅱ digital laser wavefront interferometer, have been employed to accomplish the digital analysis for their static interferogram with high accuracy. This paper describes the basic procedures of the new algorithm according to the principle of interference and gives the experiment results analyzed by our written software. Compared to the results obtained by phase-shifting method, the new algorithm is expected to have the accuracy of for flat with diameter of 60mm.
出处
《光学技术》
CAS
CSCD
2001年第6期564-565,共2页
Optical Technique
