摘要
采用多层膜系是进一步提高诸如TiN等力学薄膜性能的有效方法之一。综述了有关方面的研究情况。目前已经投入应用的各种氮化物薄膜是最简单的多层膜的原型 ,其内设的过渡层可改善膜 /基附着力 ;多层膜性能与组层结构有关 ,适当的层间厚度 (调制周期 )可显著提高多层膜的力学性能 ,适当的亚层组合可获得同时兼具高硬度和良好韧性的力学薄膜。
Properties of mechanical films such as TiN can be effectively improved by using multilayers. Recent research results have been summarized in this paper. Nitride films with transition layers are the simplest prototype of multilayers, which can improve adhesion between films and substrates. Mechanical properties are related to multilayer modulation wavelength and difference in the properties of two layers.
出处
《机械工程材料》
CAS
CSCD
北大核心
2001年第7期12-14,33,共4页
Materials For Mechanical Engineering
关键词
多层膜
过渡层
力学薄膜
力学性能
multilayer
transition layer
mechanical film
film mechanical property
