用球面共焦Fabry-Perot干涉仪测量微振动

MICRO-VIBRATION MEASUREMENT USING FABRY PEROT INTERFEROMETER

介绍一种光学非接触测量超微振动的方法 ,利用球面共焦 Fabry- Perot干涉仪设计了微振动测量系统 .与传统的测量方法相比 ,该系统具有非接触、高灵敏度、高频响、高空间分辨率等特点 ,便于实现连续、快速、自动化检测 ;根据实验要求 ,设计了腔长 0 .5 m、带宽5 .9MHz的 Fabry- Perot干涉仪 ,并组成测量系统 ;通过实验 ,检测出 5 MHz脉冲压电换能器产生的微振动波形 ;为了克服环境噪声对测量系统的影响 ,采用自动稳腔长的方法 。

This article presents an optical non contact method to measure micro vibration.It is an optical measuring system with a spherical Fabry Perot interferometer to detect the solid surface micro vibration.Compared with conventional methods,this system have many advantages,such as non contact,sensitivity,high bandwidth,high spatial resolution,and so on.It is easy to realize rapid scanning and automatic measurement.A 5 MHz micro vibration waveform can be monitored with this system.The optical feedback system is used to adjust the cavity length of interferometer in order to eliminate interferences.