几种新型超硬薄膜的研究进展

NOVEL SUPERHARD FILMS

超硬材料主要由Ⅲ ,Ⅳ ,Ⅴ族共价键化合物 (碳化物、氮化物 )和单质 (金刚石 )组成 ,硬度高于 4 0GPa ,有单晶、多晶、非晶等多种 .除金刚石外 ,这些材料都是人工合成的 ,没有天然对应物 .除超硬性质以外 ,这些材料大都具有宽带隙、高温稳定性、化学惰性等优良的物理化学性质 .新型超硬薄膜材料研究从金刚石开始 ,目前主要的研究对象有金刚石、类金刚石碳 (DLC)、立方氮化硼 (cBN)、氮化碳 (C3N4 ,CNx)、硼碳氮 (BCN)等 ,是近二十年来材料研究的热门方向之一 .文章结合作者近年来的工作 ,介绍这几种超硬薄膜的研究进展和展望 .

Superhard materials,defined as having a microhard ness exceeding 40GPa, have attracted extensive interest for decades. They are co mposed of compounds of group Ⅲ, Ⅳ and/or Ⅴ(carbides and nitrides)and elementa l crystal (diamond). Except for diamond, all these materials can only be synthes ized by artificial methods .Other interesting properties of these materials incl ude their wide band gap, stability under high temperature and chemical inertness . Current research on these materials concentrates on diamond, cubic boron nitri de(cBN), carbon nitride(C 3N 4, CN x), boron carbonitride(BCN)and diamond like carbon(DLC). A review is presented of the progress and future of these in teresting materials, in connection with our own recent studies on the synthesis and properties of wide band gap and superhard materials.