摘要
应用相移干涉术测量物体表面微观形貌时 ,由于各种因素的影响 ,表面形貌的测量会产生失真的现象 .本文采用数字信号滤波与平滑技术消除了测量过程中系统误差引起的波纹度及系统噪音 ,去除了在图象的数字化和传输过程中产生的高频噪音和假轮廓 。
When applying phase stepping interferometry to measure testing surface,distortion will be caused as a result of various error factor.Digital signal filter and smoothness technique was applied in this paper,and flexuosity and system noise caused by system error in measure process were eliminated.The high frequency noise and artificial profile caused by image digital and transmite process were eliminated too.All of this made the measure results more approach actual numerical value.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2001年第11期1372-1375,共4页
Acta Photonica Sinica
