摘要
阐明了微机电系统（ＭＥＭＳ）的学科内涵，概述了体微机械加工技术、表面微机械加工技术和复合微机械加工技术的特点，运用具体实例对三种硅基微机械加工技术的基本制作工艺过程进行了讨论。
The connotation of micro electro mechanical systems (MEMS) is clarified. And the characteristics of bulk micro-machining, surface micro-machining and hybrid micro-machining are summarized. By living examples, this paper discusses the basic fabrication process.
出处
《半导体技术》
CAS
CSCD
北大核心
2001年第8期6-10,共5页
Semiconductor Technology
