摘要
采用激光全息干涉测量技术测量了轴对称型大功率晶体三极管温度场的全息干涉图 ;利用MATLAB数字图像处理工具箱对干涉条纹做了判读 ,并分别运用Abel法和小波变换法重建温度场。测量结果表明 ,温度场的空间分辨率为 0 .0 5 1cm ,误差小于 4 .8%。
The holographic interferogram of the temperature field for an axisymmetrical high power semiconductor triode has been obtained by using laser holographic interferometric measurement. The projection value has been extracted by using MATLAB toolbox. The temperature field has been reconstructed by using Abel transform method and wavelets transform technique. The measurement result indicates that the spatial resolution is 0.051 cm, with the measuring error of <4.8%.
出处
《半导体光电》
CAS
CSCD
北大核心
2001年第5期369-371,共3页
Semiconductor Optoelectronics
基金
国家重点基础研究发展规划项目 (G2 0 0 0 0 6 30 3)
关键词
光学测量
全息干涉
三极管
温度场
激光测量
optical measurement
holographic interference
temperature field of semiconductor triode
