5Jalali, Trinh P D, Coppinger F, et al. Guided-wave optics in silicon on-insulator technology [J]. IEEE Proc. Optoelectron,1996, 143(5) :307-311.
6Wu Ming C. Micromaching for optical and optoelectronic systems[J].IEEE Proc,1997, 85(11):1833-1856.
7Lopez A G, Craighead H G. Subwavelength surface-relid gratings fabricated by microcontact printing of self assembled monolayers[J]. Appl Opt, 2001, 40 (8) 2068-2075.
8Malt J N, Scherer A, Dai O, et al.. Diffractive lens fabricated with binary features less than 60nm[J]. Opt Lett,2000,25(6):381-383.
9JALALI B, TRINH P D, COPPINGER F, et al. Guided-wave optics in silicon-on-insulator technology[J]. IEEE Proc Optoelectron, 1996,143(5) : 307-311.
10WU Ming. Micromaching for optical and optoelectronic systems[J]. IEEE Proc, 1997,85(11): 1 833-1 856.
