溶胶-凝胶法制备TiO_2薄膜及其光学特性

Optical Properties of TiO_2 Thin Films Derived by Sol-gel Method

采用溶胶 -凝胶方法在二氧化硅玻璃基片上制备了TiO2 薄膜 ,通过测量薄膜在紫外 -可见光波段的透射率和反射率光谱 ,对其光学特性和吸收边缘进行了研究 .实验结果表明 ,吸收边缘大约在 35 0nm附近 ,并且随热处理温度的升高 ,吸收边缘向长波方向移动 ,锐钛矿相的禁带宽度比金红石相的禁带宽度高 0 .

We present an investigation on the optical properties as well as absorption edge of TiO 2 thin films deposited on silica glass by the sol-gel process.UV-VIS transmission and reflection spectra have been recorded in the UV-VIS region of spectrum.The results show that the absorption edges occur around 350 nm and shifts towards higher wavelengths with the temperature increasing.The optical energy gap of anatase phase is higher than that of rutile by 0.15 eV.