主动控制空气静压精密直移工作台系统的研究

The High Precise Straight-moving Work-bench with the Active Controlled Air Bearings

基于伺服控制理论 ,介绍一种新型超精密直线运动工作台 .精密工作台的底部和四周共设置九个主动空气支承 ,普通机械导轨拖动 ,除运动方向外其余五维位置姿态由两只四光束激光探头进行测量 ,并将测量值送控制器与目标值比较 ,驱动压电陶瓷致动补偿空气膜厚度随外部干扰变化对运动精度的影响 .系统固有误差作预处理后 。

This paper introduces a new straight moving work bench with high precision on the servo control theory. The precise work bench has nine active air bearings at the bottom and all around, and it is driven by common machine guide. 5 D position posture except motional direction is measured by two probes with four beamed laser, and the values measured are delivered into controllers as compared with target values, and piezoelectric ceramics are driven to compensate the variance of air membrane thickness with internal interference to maintain the motional precision. If the stable errors in the system are preprocessed, the motional precision will be mainly depended on the precision of probes, and improved severely. This system has high value in theory and application.