迈克耳逊激光干涉仪的数字测角技术

A digital angle measurement technique based on Michelson interferometer

介绍了一种利用迈克耳逊干涉仪进行精密角度测量的角度测量系统 ,该系统利用迈克耳逊干涉仪的干涉技术 ,通过转换将角位移转换为干涉仪可以利用的线位移 ,并通过专用电路对干涉条纹进行细分、计量 ,从而实现了对大转角的精密测量。与以往类似系统相比 ,该系统克服了测量误差随测量角度增大而增大、测量范围小等不足 ,具有测量精度高、测角范围大、数字化程度高等特点。同时 ,给出了系统的构成原理、设计注意事项和有关的精度分析。

A digital angle measurement technique based on Michelson interferometer is introduced in the paper.Through changing the angular displacement into linear displacement,using special circuits to subdivide and measure the interference pattern,exact measurement for a big angle is realized.Compared with other similar measuring system,this system can be applied to wider-angle measurement with high accuracy.The principle of the system,some special notes and error analysis have been introduced.