微波等离子体刻蚀处理对金刚石薄膜涂层刀具附着力和切削性能的影响(英文)

Effect of microwave plasma－etching decarburization on adhesive strength and cutting performance of CVD diamond－coated tools

用HFCVD法在硬质合金（ YG6）刀具衬底上沉积金刚石薄膜，用氢微波等离子体刻蚀的方法 对衬底进行表面预处理， 研究了该预处理技术对 WC硬质合金衬底表面成分的影响。 进一步探 讨了所沉积金刚石薄膜的表面形貌和附着力，并通过难加工材料实际切削试验，研究了所制备的金刚石薄膜涂层刀具的切削性能。试验结果表明，Ar－H2微波等离子体刻蚀脱碳处理是提高金刚石薄膜附着力和改善涂层刀具切削性能的有效预处理方法。

Diamond thin films were deposited on cemented carbide substrates (YG6) by the hot filament chemical vapor deposition(HFCVD). A pretreatment method using etching decarburization by microwave plasma was performed on the substrate. The effect of this pretreatment process on WC substrate surface chemical composition was investigated. The influences of this pretreatment on the adhesion strength and surface morphology of the diamond thin film were analyzed. The cutting performances of the diamond－coated thin film tools were studied by a cutting tests of difficult－to－machining materials. The research results show that the pretreatment process using Ar－H2 etching decarburization by microwave plasma is an effective method to improve the adhesive strength and cutting performance of diamond－coated tools.