TiC/i-C复合硬质薄膜的制备和摩擦学行为的研究(英文)

Study on preparation and tribological behavior of TiC/i－C composite hard film

介绍一种 TiC/i－ C双层复合硬质薄膜，该复合膜由碳化钛（ TiC）膜层和 i－ C（离子辅助沉 积）无定形硬质碳膜组成。采用反应磁控溅射的方法沉积碳化钛（ TiC）膜层。随后在维持镀膜系 统真空度的情况下，利用等离子体分解结合高能离子轰击的方法不间断地连续制备 i－ C类金刚 石薄膜。 TiC膜层对金属基片和表面 i－ C膜层都有良好的附着与结合强度， 因此被用作中间过 渡层，而表面 i－ C膜层则保持了 DLC薄膜硬度高和摩擦系数小等优良的性能。对 TiC/i－ C复 合膜的机械性能和摩擦学行为的测试显示该复合膜具有非常高的显微硬度及优良的摩擦学特性， 诸如很高的抗附着磨损、磨耗磨损、划痕磨损的性能及很低的摩擦系数。与 TiC单层膜与 DLC单 层膜比较，显示该 TiC/i－ C复合膜更能适合实际应用的需要，在国民经济中将有广阔的应用前景。

A double－ layer composite hard film is introduced. It consists of a TiC film and an i－ C (ion assisted deposition) amorphous hard carbon film. The TiC film was prepared by a magnetron controlled reactive sputtering unit and then the i－ C film was uninterruptedly prepared by means of plasma decomposition combined with high energy ion bombardment . The TiC film serves as the transition layer because it has a good coalescence and adhesion strength to the substrate and the surface DLC layer, and the i－ C film as the surface layer because it has excellent mechanical perfor－ mances, such as very high hardness and low friction coefficient. Measurements of the mechanical properties and tests of the tribological behavior show that the TiC/i－ C composite films have very high hardness and excellent tribological characteristics, such as high anti－ adhesion wear, abrasion wear, scratch wear and low friction efficiency and so on.