摘要
利用有限元法模拟计算了旋转平面夹具、旋转球面夹具、行星旋转球面夹具的膜厚均匀性 ,分析了均匀性的影响因素 。
In this paper,finite cells method is used to simulate the film thickness uniformity.Three different holders including rotating plane holder,rotating sphere holder,planet rotating sphere holder are discussed.The influencing parameters of film thickness uniformity,and the method of adjusting the parameters are studied.
出处
《光学仪器》
2001年第5期5-10,共6页
Optical Instruments
