摘要
介绍了利用计算机对光学薄膜淀积过程进行仿真 ,编写了基于 Matlab的计算机仿真程序。对采用反射率极值法监控的镀膜系统的薄膜淀积结果以及薄膜淀积过程中监控片透射率的实时变化进行了模拟 ,根据模拟结果所计算的薄膜的光学特性曲线与成膜的实测结果一致。
Computer simulation of optical thin film deposition is explained in this paper.Computer emlutor based on Matlab is composed,real time simulations of coating system deposition with the method of reflectivity turning point and monitoring chip transmittance are done.The optical charactical curve by simulation is in tone with real measurement.
出处
《光学仪器》
2001年第5期15-18,共4页
Optical Instruments
关键词
薄膜淀积
极值监控法
计算机模拟
光学薄膜
thin film depositon
turning point monitoring
computer simulation
