摘要
论述了薄膜应力在强激光薄膜应用中的重要性 ,分析了应力的形成原因及沉积参数、老化条件的关系 。
The serious influence of stress on high power laser thin films was discussed in this paper. The origination of stress and the correlation between stress and deposition parameters and aging conditions were analyzed. A simple stress testing method and some testing results were presented in the context.
出处
《光学仪器》
2001年第5期84-91,共8页
Optical Instruments
