摘要
研究成功一台变入射角反射式消光法多功能智能椭偏测厚仪。实验表明 :仪器的测厚准确度为± 0 1nm ;椭偏参数Ψ和Δ的测量重复性精度分别为± 0 1°和± 0 3° 。
A multifunctional automatic null ellipsometer with variable angle was developed The experimental results show that the accuracy of measuring the film thickness is ±0 1nm and the repeatability of Ψ and Δ is ±0 1° and ±0 3° respectively The ellipsometer is suitable to measuring the thickness and refractive index of the film
出处
《光学技术》
CAS
CSCD
2001年第5期432-434,共3页
Optical Technique
关键词
椭偏仪
消光法
膜厚
ellipsometer
null method
film thickness
