微光成型法微细光束紫外光源的研制

Research and manufacture of lamp-house of micro-beam of ultraviolet light in micro stereo photo lithography

简要介绍了光成型法的原理以及在微细加工领域应用所需解决的关键问题。着重就选取经济性好的球形高压汞灯作为光源发光体 ,通过对聚光系统结构和聚光能力 ,导光光路的传导方式和光能传递效率以及缩微光路的成像性质的综合分析 ,并结合各级传输的光束特性进行优化设计 ,选取两平凸透镜聚光系统和光纤导光方式 ,并利用显微物镜的微缩特性 ,研制成紫外光光源。该光源可产生直径为数微米的微细光斑 。

The theory of stereo photo lithography and the key points of the applications of MSPL in micro fabrication field are briefly introduced Take economical high voltage spherical mercury arc lamp as the luminant of lamp house Though the synthetic analysis of the structure of the focus system, the ability to gather light, the way to transmit beam, the transmitting beam energy efficiency, the micro beam imaging property and transmitting beam character, the design is optimized Choosing two plano convex lens as focus system, using fiber to transmit beam, and using object lens of microscope, the lamp house of micro beam of ultraviolet light has been manufactured The lamp house can generate micro facula with several microns diameter It has been applying to the research of micro structure manufacturing of Micro Stereo Photo Lithography