SOI脊形光波导的设计与研制

Design and Manufacture of SOI Ridge-shaped Waveguide

利用有效折射率的数值解法 ,计算出了SOI脊形光波导的有效折射率。由此得到SOI脊形光波导传输单模光波时内外脊高b ,h及脊宽W的尺寸。在此基础上研制了SOI光波导 ,测得其传导损耗为 0 .

Using the numerical iteration, the effective refractive index of ridge shapes waveguide have been figured out. From the effective refractive index inner and outer height b and h and ridge width W can be decided. The SOI waveguide with above parameters have been made,its propagation loss measured is 0.87dB/cm.