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Ti/Me多元复合靶真空电弧沉积的研究

Vacuum Arc Deposition with Ti/Me Multi-element Composite Targets
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摘要 用Ti/Mo、Ti/W、Ti/FM复合靶和真空电弧沉积技术制备了三种多元多层膜 ,并对其组织结构与性能进行了研究。结果表明 ,多元复合靶与多元膜层之间存在着成分离析效应 ,组元Mo、W和Fe具有负的成分离析 ,而组元Cr和Al与靶材的成分相当。多元膜层致密 ,其结构形式为 (Ti,Me) 2 N和 (Ti,Me)N。测试表明按多元多层膜设计的膜层Ti/TixN/ (TiyMe1- y)N/ (Ti,Me) xN具有较高硬度和耐磨性能 ,经 60 0℃× 10 0h的氧化 ,多元多层膜有良好的抗氧化性能 ,其中以含W的膜层的抗氧化性能最佳。 Three kinds of multi element layer films were deposited by vacuum arc ion plating using the Ti/Me multi element composite cathode targets. The microstructure and properties of the films were studied. The results showed that the composition demixing phenomena occurred between the composite targets and the films. Components Mo, W and Fe were of negative demixing, the components, Cr, Al were of the same contens as composite targets. The structure of the films was mainly (Ti,Me) 2N and (Ti,Me)N with high compactability. The multi element layer films Ti/Ti xN/(Ti yMe 1-y )N/(Ti,Me) xN had high microhardness, good wear resistance and excellent oxidation resistance at 600℃×100h, specially the films containing W was the best.
出处 《机械工程材料》 CAS CSCD 北大核心 2001年第11期30-33,共4页 Materials For Mechanical Engineering
基金 广东省高教厅基金 ( 970 0 32 ) 三束材料改性国家重点实验室基金资助项目
关键词 多元多层膜 真空电弧沉积 组织 性能 物理气相沉积 multi element layer film vacuum arc plating microstructure and property
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