纳米电磁致动器的发展

Development of Nanometer Electromagnetic Actuators

纳米致动器是纳米测控的关键部件 ,而纳米测控又是纳米技术的重要基础。讨论了纳米冲击式电磁致动器工作原理 ,给出冲击式电磁致动器的一些典型结构 。

Nanometer actuators (also called microdrivers, micropositioners etc.) are key parts of nanometer measurement and control devices, and the latter is the important foundation of nanotechnology. This paper discusses the principle of nanometer electromagnetic impulsive actuators, gives some typical structures, and presents a combination actuator of new mechanism developed by the authors.