基于厚膜技术E型三维加速度传感器的设计

E-type 3-D Accelerometer's Design Based on Thick Film Technology

提出采用厚膜技术设计一种一体化三维加速度传感器 ,其采用E型结构和特殊的组桥方式实现对三维加速度信息的检测。介绍了传感器的结构 ,并详细讨论了传感器工作原理和维间耦合问题。由于E型结构的对称性 ,使得所设计的三维加速度传感器在低量程、高灵敏度应用场合中具有良好的特性。

A monolithic 3-D accelerometers,based on thick film technology and E type structure,is offered in this paper.By four pinzoresistance sensing elements placed in three different axis directions on the transducer,the 3-D aeceleration information can be obtained by special Wheatstone bridges.Especially,the sensor's structure, working principle and cross-axis sensitivities were also discussed in details.For the symmetric stmcture,the sensor has good performance in low range and high sensitivity measurement application.