摘要
提出采用厚膜技术设计一种一体化三维加速度传感器 ,其采用E型结构和特殊的组桥方式实现对三维加速度信息的检测。介绍了传感器的结构 ,并详细讨论了传感器工作原理和维间耦合问题。由于E型结构的对称性 ,使得所设计的三维加速度传感器在低量程、高灵敏度应用场合中具有良好的特性。
A monolithic 3-D accelerometers,based on thick film technology and E type structure,is offered in this paper.By four pinzoresistance sensing elements placed in three different axis directions on the transducer,the 3-D aeceleration information can be obtained by special Wheatstone bridges.Especially,the sensor's structure, working principle and cross-axis sensitivities were also discussed in details.For the symmetric stmcture,the sensor has good performance in low range and high sensitivity measurement application.
出处
《仪表技术与传感器》
CSCD
北大核心
2001年第9期3-5,共3页
Instrument Technique and Sensor
基金
传感器技术国家重点实验室基金支持
关键词
厚膜技术
三维加速度传感器
E型结构
维间耦合
设计
Thick Film Technology,3-D Accelerometers,E-Type Structure,Cross-axis Sensitivies