高静电场下的薄膜测厚技术

A New Technology of Testing the Film Sickness in the Static State

针对实际生产中遇到的薄膜静电影响问题 ,采用了一种比较巧妙的电路方法———线圈隔离法消除了静电的影响。该技术是一种实用的在线薄膜测量技术 ,也可以运用到其他电容式传感器非接触式的在线测量中。

This paper describes a new technology of testing the sickness.We introduce a method to avoid the effect of static in the capacitance sensor. This method can especially be used in the film thickness measuring.