钽表面离子渗氮层的组织与结构

Structure and Morphology of Ion-nitriding Case of Tantalum

采用SEM ,XRD ,SIMS等手段对钽在氢与氮等离子体中形成的表面层的物相与组织进行了分析。试验发现 ,Ta表面在H、N等离子体中渗氮得到的渗氮层均匀、致密 ,由体心立方的超晶格TaN0 1和化合物Ta6N2

The surface layers of tantalum produced in the mixture of hydrogen and nitrogen are investigated by SEM,XRD,SIMS etc.It is found that the nitriding layer is uniform and compact.It was composed of bcc super lattice TaN 0 1 ,compound Ta 6N 2.57 and solid solution.