溶胶-凝胶法制备Ba_xSr_(1-x)TiO_3铁电薄膜的研究

Study On Ba_xSr_(1-x)TiO_3 Ferroelectric Thin Film Prepared by Sol-Gel Methods

介绍了Ｓｏｌ－ｇｅｌ法制备ＢａｘＳｒ1－ｘＴｉＯ３铁电薄膜的工艺参数．在溶胶中加入一定体积百分含量的干燥化学控制添加剂（ＤＣＣＡ）可有效的防止薄膜开裂．通过ＩＲ、ＸＲＤ谱图、Ｃ－Ｖ回线、Ｉ-Ｖ曲线等测试方法比较了金属醇盐法和以部分醋酸盐代替醇盐法制备薄膜的微观结构和性能．实验结果表明；全部采用醇盐为原料制备的ＢＳＴ薄膜性能较好．通过两种方法制备ＢＳＴ薄膜性能的差异，本文提出了这两种方法的成膜机理．

The preparation of BaxSr1-xTiO3(BST) ferroelectric thin films was studied. A dry chemical control additive(DCCA) was added to the sol in order to avoid producing cracks. Metal-alkoxide and partial acetate methods influencing on the quality of BST thin film were also studied. The grain size, microstructure and electric properties of the films were characterized by XRD spectra, C-V characteristic, IR spectra, I-V curve, etc. The results indicate that the quality of the material synthesised by the metal-alkoxide method is better.