膜厚影响SnO_2厚膜型气敏元件敏感特性的研究

Study on the Effects of Film Thickness on the Gas-Sensing Properties of SnO_2 Thick Film Sensors

采用丝网印刷技术制备不同膜厚ＳｎＯ２厚膜气敏试样，在不同温度下进行热处理后测定了试样的阻温曲线和对乙醇气体的灵敏度，结果表明制备不同膜厚试样的气体灵敏度不同，阻温曲线也不同．要制备灵敏度高、一致性好的气敏器件，调整控制膜厚和及其热处理温度至关重要．

The effects of sintering temperature and film thickness on the gas-sensing properties of SnO2 thick film sensors were researched by measuring the ethanol gas sensitivity of the samples with different thickness films prepared by screen printing technology and sintered at different temperatures. The results show that different thickness films and different sintering temperatures greatly effect the gas-sensing properties of the samples.