制备超薄多层膜的自动转速控厚法

Automatically Rotation-speed-controlled Layer Thickness of Ultrathin Multilayer Reflectors

在转速控厚法的基础上 ,排除了射频溅射的电磁干扰 ,实现了自动转速控厚法。用这种方法镀制超薄多层膜时 ,可以实时记录下镀制每层膜的沉积时间、自动切换转速、完成设定周期后自动停止转动。自动转速控厚法与转速控厚法相比 ,明显降低了多层膜制备的劳动强度 ,提高了多层膜制备的成品率和监控精度。而且将在镀制复杂膜系多层膜时 。

After getting rid of the interference of RF, automatically rotation speed-controlled layer thickness is realized, which not only can accurately fabricate ultra-thin multilayers, but also can record the thickness of every layer and automatically change rotation speed and automatically stop rotation after fabrication is over. Compared with the rotation speed-controlled layer thickness monitoring, it's useful to reduce the intensity of labor and improve the rate of finished products. The advantage is especially obvious in fabrication complicated multilayers.