光纤共焦扫描显微镜的扫描系统畸变与校正的研究

Analysis of Distortion and Correction Method for the Optic-fiber Confocal Scanning Microscope's Scanning System

以双振镜光学扫描头作为反射式光纤共焦扫描显微镜的平面扫描机构可以实现对平面图像的快速扫描 ,但存在着畸变和渐晕问题。该文简要阐述了反射式光纤共焦扫描显微镜的基本原理 ,着重从理论上分析出目镜前的双振镜扫描的固有的几何畸变 ,以及光学扫描系统中以普通显微目镜作为扫描透镜所引起的扫描畸变 ,并从硬件和软件两个角度给出畸变校正方法。

Using dual galvanometer optical scanning head as the reflecting type optic fiber confocal scanning microscope's scanning outfit can achieve the fast scanning to plane image, but there exists distortion and vignetting. In the paper, the basic principle of reflecting type optic fiber confocal scanning microscope is described briefly. Both the distortion caused by using the common eyepiece as scanning lens and the distortion for pre eyepiece dual galvanometer scanning system have been theoretically analyzed, and both the according hardware correction method and the software correction method are given.