CVD金刚石形核的研究

Studies of Nucleation of Diamond Films Grown by Chemical Vapor Deposition

在钢渗铬层和硅片上进行了化学气相沉积金刚石膜 ,发现在渗铬层上形成的金刚石膜以球形金刚石为主 ;用高倍扫描电子显微镜分析显示 ,渗铬层上的球形金刚石是由大量二次晶核长大的微晶金刚石和非晶碳组成。

Diamond films were grown on substrates of surface chromized steel and silicon wafers by chemical vapor deposition.The microstructures of diamond films were studied with high resolution scanning electron microscopy(SEM)and Raman spectroscopy.SEM micrographs show that spherical diamond grains,grown on surface chromized steel,consist of a large number of smaller microcrystallites separated by amorphous carbon and other impurities.