等离子体显示器件中氧化镁膜的制备和测试

Deposition and testing of MgO thin film for plasma display panel

等离子体显示器 (PDP)是最有发展前景的新一代显示器件 ,Mg O膜是其制造工艺中的一个瓶颈。本文结合 PDP的发展 ,综述了近年来 Mg O膜层镀制与测试工艺的进展 ,讨论了 PDP对保护膜性能的要求。PDP市场的进一步扩大亟需在生产上建立一个能取得共识的对 Mg O膜层性能进行评价的标准。

Plasma display panel (PDP) is one of the most promising generation of display devices. However, deposition of MgO is the bottleneck in the production process. Based on a review of MgO thin film deposition and testing, the requirements on the layer characteristics for a protective film are discussed. It's necessary to establish a common standard for the layer characteristics in order to meet the challenge in PDP market development.