SrBi_2Ta_2O_9铁电薄膜的结构与性能研究进展

Progress in the Structure and Properties of Ferroelectric SrBi_2Ta_2O_9 Thin Films

综述了 Sr Bi2 Ta2 O9的结构和性能研究进展 ,着重阐明化学组成、结晶取向、热处理条件、使用温度对 Sr Bi2 Ta2 O9铁电性能的影响。结果表明 ,以 Bi4Ti3O1 2 作为过渡层 ,采用快速热处理法 ,Sr∶Bi∶ Ta=0 .8∶ 2 .2∶ 2时 ,有助于提高 SBT薄膜的剩余极化值 。

The progress in the structure and properties of ferroelectric SrBi 2Ta 2O 9 thin films was reviewed Special attention was focused on the effect of the chemical composition, crystal orientation, annealing conditions and service temperature on SrBi 2Ta 2O 9 ferroelectric properties The results show that the SBT thin film with Sr∶Bi∶Ta=0 8∶2 2∶2 on the Bi 4Ti 3O 12 buffer, prepared by a rapid thermal annealing, possesses the high remanent polarization, the low coercive filed and the low loss current