摘要
研究了一种光调制交流光栅位置检测系统 ,它是一种交流系统 ,抗干扰能力强 ,细分电路简单 ,并可获得高的细分数 ,大大提高了光栅测试系统分辨率。
The paper deals with a positional detection system of alternative grating working with light modulation. It is an alternative system with a powerful anti interference ability and simple detailing circuit so that the great number of subdvision can be gained,whereby the resolution of grating measurement system can be greatly improved.
出处
《西安理工大学学报》
CAS
2001年第3期301-304,共4页
Journal of Xi'an University of Technology
关键词
光调制交流光栅
位置检测
锁相倍频细分
light modulation alternative grating
positional detection
phase locked double frequency subdvision
