摘要介绍了２４８ｎｍ，１９３ｎｍ。The development process of 248nm,193nm,157nm technologies is described in this paper,as well as the application prospect of NGL technologies is introduced.
3M C Gower. Industrial applications of pulsed lasers to materials processing[C]SPIE, 1998, 3343:171.
4R C Crafer , P J Oakley. Laser processing in manufacturing [ C ] M.C.Gower.Excimer lasers: current and future applications in industry and medicine. London:Chapman & Hall, 1993:189-200.
5Mordechai Rothschild, Anthony R Forte, Mark W Horn, set al. 193-nm Lithography [J].IEEE,1995,1 (3) :916-923.
6Osnat Feuerstein,Daniel Palanker, Amihay Fuxbrunner. Effect of the ArF Exicmer Laser on Human Enamel [J].Laser in Surgery and Medicine, 1992 ( 12 ) :471-477.
