摘要
提高金刚石薄膜与硬质合金基底之间的附着力是CVD金刚石薄膜刀具得以推广应用的关键因素。本文介绍了国内外采用CVD法制备金刚石薄膜刀具时提高膜—基附着力的典型工艺方法 ,评述了WC
To extend the applications of CVD diamond coated tools, the improvement of adhesion between the diamond film and cemented carbide substrate is a key factor. Some typical technologies to improve the adhesion during preparing diamond coated tools by CVD method are introduced, and the influence of various pretreatments and depositing techniques on the adhesion of diamond coatings on WC Co substrates is commented.
出处
《工具技术》
北大核心
2001年第9期3-8,共6页
Tool Engineering
关键词
刀具
金刚石薄膜
膜一基附着力
化学气相沉积
CVD
tool, diamond film, WC Co substrate, film substrate adhesion, chemical vapor deposition(CVD)