低能量X-RAY测厚仪与β-RAY测厚仪在薄膜生产中的应用比较

Comparison of Low-Energy X-RAY Thickness Measuring Device and β-RAY Thickness Measuring Device Applied to Film Manufacture

分析比较了低能量 X- RAY和β- RAY两种测厚仪在薄膜生产测量中的差别。指出低能量 X- RAY测厚仪将逐渐替代 β- RAY测厚仪 ,成为今后薄膜厚度测量的主流机型。

Difference between low energy X RAY thickness measuring device and β RAY thickness measuring device used in film manufacture is analysed. It is pointed out that the low energy X RAY device will gradually replace the β RAY one , and become an essential model for film thickness measurement in years to come.