粉粒沉降过程中冷等离子体纯化效果研究

A study of purity effects of cold plasma during the process of Si-Ge particulates drop

本文通过实验证实了粉粒沉降过程中冷等离子体的纯化作用 ,并探索了阴极板温度、放电电流、放电时间等参数对纯化效果的影响 。

The experiments showed purity effects of cold plasma during the process of Si Ge particulates drop The influence of parameters of cathode plate temperature, discharge current and treat time on purity effects was probed in this paper And the study lays a foundation for industry