PtSi/p-Si异质薄膜研究的新进展

New progress in research on PtSi/p-Si heterogenous films

综述了 Pt Si/p- Si异质薄膜近年来研究的新进展 ,包括 Pt Si/p- Si的制备工艺、相形成与分布、Pt Si/p- Si界面的微结构、价电子结构以及 Pt Si/p- Si肖特基势垒的研究现状 ,并且探讨了 Pt Si/p- Si的发展方向。

In this paper,new progress in research on PtSi/p Si heterogenous films is reviewed,including the preparing techniques,phase formation and distribution,microstructure and valence electronic structures of the interface,Schottky barrier height of PtSi/p Si.Some viewpoints for development direction of PtSi/p Si in future are discussed.