摘要
综述了VO2 薄膜的结构特点、相变、制备工艺特性 ,以及薄膜研究、应用和开发现状 ,认为VO2
The micro_structure ,the phase transition,preparationand processing properties of VO 2 thin films are described.The pressent situation,development and application of VO 2thin film are given.There will be a good developing prospect in VO 2 thin film.
出处
《真空与低温》
2001年第3期136-138,共3页
Vacuum and Cryogenics