磁控溅射MoS_2+Sb_2O_3防冷焊薄膜性能研究

THE PROPERTIES OF MoS_2+Sb_2O_3 ANTI-COLD WELDING THIN FILM BY MAGNETRON SPUTTERING

MoS2 溅射膜具有在潮湿大气中容易发生氧化而失去润滑作用的缺点。为了解决这个问题 ,将Sb2 O3 添加于MoS2 中 ,用磁控溅射法制备了MoS2 +Sb2 O3 薄膜 ,并利用球 -盘式磨损试验机考察了它对薄膜摩擦特性的影响。通过XRD、XPS、AFM对MoS2 +Sb2 O3 薄膜的微观结构和形貌及其化学状态进行了分析。实验结果表明 :薄膜的微观结构致密、晶粒小、分布均匀 ,有良好的润滑性、防冷焊性 ,特别适用于卫星活动部件的固体润滑。

MoS 2 has excellent lubrication properties,but sputtered MoS 2 films have obvious shortcomings that they were oxidized easily and the lubrication properties are lost in moist air.In order to resolve the problem,sputtered MoS 2 films dopped with Sb 2O 3 on tribological properties were investigated with ball_disk tester.The microstructure morphology and the chemical states of sputtered MoS 2 films were analyzed using XRD, AFM and XPS.The experimental results indicate the film has dense microstructure, small crystal size and uniform distribution.It has excellent lubrication and anti_cold welding properties, especially applied to solid lubrication of moving mechanisms of satellites.