兰州重离子冷却储存环超高真空系统首台样机的研制

DEVELOPMENT OF THE FIRST UHV PROTOTYPE OF HIRFL-CSR

介绍了兰州重离子冷却储存环 (HIRFL -CSR)超高真空系统首台样机的研制过程 ,给出了实验结果。介绍各真空室结构 ,对关键标准设备进行了测试与选型。根据实验结果估算出极限真空条件下材料的表面出气率 ;根据公式估算出钛升华泵的有效抽速并通过实验得到证实 ;对真空烘烤装置的初步工作也作了介绍。样机达到了 3× 10 -9Pa的设计指标 ,结果表明HIRFL

The development process of the first ultra_high vacuum prototype of HIRFL_CSR is introduced and the results are given. The structure of the vacuum chambers designed for the prototype is described , The key standard equipments are tested and chosen.The out_gassing rate of the chamber materials in the ultimate pressure is estimated in terms of the experimental results.The effective pumping speed of the titanium sublimation pump is calculated according to the formulas and is validated by the experiment.The progress of the vacuum baking system is introduced as well.The expected pressure of 3×10 -9 Pa has been obtained and kept.It means the design of the UHV system of HIRFL_CSR project is feasible.