Ti-Ta-O复合薄膜的制备及抗腐蚀性

SYNTHESIS AND CORROSION RESISTANCE OF Ti-Ta-O COMPOSITE FILM BY ION BEAM ENHANCED DEPOSITION

采用离子束增强沉积法在 ＮｉＴｉ基体上合成了具有不同组分比的 ＴｉＴａ-Ｏ薄膜 研究了组分比对薄膜的相结构、力学性能和抗模拟体液腐蚀性的影响ＳＥＭ，ＡＦＭ和ＸＲＤ分析表明，所有薄膜均由纳米粒子堆积而成，膜层连续光滑，纯Ｔｉ-Ｏ膜为金红石结构，而 Ｔｉ-Ｔａ—Ｏ膜为非晶态 划痕实验、显微硬度分析和电化学测试研究表明，加人Ｔａ后，膜与基体间的结合强度、韧性和抗腐蚀性增强，显微硬度下降．

Ti-Ta-O films with difFerent compositions were synthesized on NiTi substrates by lon Beam Enhanced Deposition and examined by SEM, AFM, XRD and etc. The dependence of the Structure, mechanical properties and corrosion resistance in SBF of the film on its composition was studied. AIl the films were dense, unifOrm and composed of nano--sized particIes. The pure Ti-O film existed in the fOrm of rutile Structure, while the films containing Ta were in amorphous State. The scratch teSt, microhardness anaIysis and electrochemical measurement showed that the adhesive strength, toughness and corrosion resistance were improved by the addition of Ta, while the microhardness was reduced. 36% (atomic fraction) is optimum content of Ta for improving corrosion resistance.