摘要
CMOS集成电容绝对压力传感器是基于集成电路主流工艺集成的新型传感器 ,克服了传统传感器的缺点并利于批量生产。介绍了传感器的原理、结构及处理电路 ,并对微系统集成的概念及生产工艺进行了讨论 ,对传感器的应用前景及领域进行了展望与预测。
Integrated absolute capacitive pressure sensors, coping with disadvantages of traditional sensors and being applicable of batch-processing,are novel sensors based on CMOS IC Technology.The concept of several absolute pressure sensors,structures of the sensors and signal processing circuits are illustrated,integrated microsystems and processing technology of integrated absolute pressure sensors are also discussed.Prospective applications are predicted.
出处
《仪表技术与传感器》
CSCD
北大核心
2001年第11期5-8,共4页
Instrument Technique and Sensor
基金
教育部跨世纪优秀人才培养计划基金资助项目
