高支化碱溶性丙烯酸化聚酯光刻胶的性能及成像性研究

A STudy on the Properties and Imaging Behavior of Highly Branched Alcali -soluble Polyacrylate Photoresist

将高支化碱溶性丙烯酸化聚酯用于光致抗蚀剂,因其独特的三维结构而具有的低粘度,高活性使抗蚀剂膜收缩率小,而具有良好的成像显影性。通过控制合适的树脂酸值及成像显影条件,可得到良好断面的图像,并且抗蚀剂线条图分辨率可达～1μm。当光源分别为平行光和点光源时图像清晰程度不一样:平行光比点光源好。

Highly branched alcali -soluble polyacrylate resins possess specific t ri -dimensional structure,thus perform low visosity;their high activity can decrease the contraction rate of ph otoresist layer;consequently these resins can exhibit good image developement beh avior.Through proper setting the acid value of the resin and the imaging a nd development conditions,excellent section picture can be obtained,yie lding a high resolving power of l mi-cron.Lighting conditions are attac hed.