定向棱镜谐振腔准分子激光器

Excimer Laser With Directional Prism Cavity

在普通平－平腔ＸｅＣｌ准分子激光器中，用定向棱镜替代平面全反射镜，构成定向棱镜谐振腔准分子激光器．该激光器获得了高抗失调能力和在近场具有相干平顶式的均匀光场、远场具有能量集中的光场分布，压缩了光束发散角，改善和提高了光束质量．提供了一种实用新型的准分子激光器技术．

In common XeCl excimer laser, using directional prism to replace entire reflection mirror, excimer laser with directional prism cavity was obtained. The laser is high stability of anti-disalignment. Beam distribution is coherent flattened in the near field and focusability in the far field. Directional prism cavity compresses the beam divergence angle, and improves the beam quality This paper provides a novel utility excimer laser technology.