微电子机械技术的发展与现状

The State-of-the-Art of Micro Electro Mechanical Systems

文章回顾了微电子机械技术的发展历程和研究内容 ,介绍了国内外一些具有发展前景的微电子机械系统 。

The evolution of micro electro mechanical system(MEMS) is reviewed in the paper The state of the art of technologies for MEMS is described Some promising MEMS products are examined, and problems associated with the technology are also discussed.