齿轮全谐波误差分离技术

Full-harmonic error separation technique for gears

齿轮全谐波误差分离技术是一种新的亚微米级测量技术。在一台光栅式齿轮整体误差测量仪上 ,它用三点法误差分离技术能分离开仪器轴系测量链的系统误差 (包括测量蜗杆误差、光栅传感器误差、轴承回转误差等 )和被测齿轮的全谐波误差。因而能满足 5级或更高级别的齿轮测量要求。在对上述误差进行谐波分析后 ,可找出仪器及被测齿轮的误差来源。这就提供了进一步提高仪器测量准确度的可能性 ,从而使新一代超精密齿轮整体误差测量仪的测量不确定度可以从微米级提高到纳米级的水平。

The full-harmonic error separation technique for gears is a new kind of sub-micr on measuring technique. On a grating type gear integrated error measuring equipm ent, this technique employs the three-point method error separation technique fo r separation of the systematic error of the measuring chain of equipment spindle system (including measuring worm error, grating transducer error, bearing rota ry error etc.) and the full-harmonic error of the measured gear. Thus the requi rement for the 5th or even higher accuracy grade in gear measurement can be fulf illed. Harmonic analysis for the above-mentioned errors can be made; based on th e result of this analysis the source of the equipment error and that of the meas ured gear can be found out. This provides the possibility of further enhancement of measurement accuracy of the equipment, further improvement of the machining accuracy of the measured gears and also the improvement of quality of gear trans mission. The measurement uncertainty of a new generation ultraprecision gear int egrated error measuring equipment can be raised from micron to sub-micron levels