期刊文献+

白光干涉仪中多波长值的优化选择 被引量:2

Optimum Selection of Multi-wavelength in White-light Interferometer
下载PDF
导出
摘要 本文分析了白光干涉仪中多波长值的选择对条纹可见度尤其是对零级条纹附近可见度的影响,给出了使用相干长度都较短的两个和三个波长组成的光源情况下波长值优化选择的原则及其数值模拟的例子.本文的结果可用于白光干涉仪的优化设计. In this article, we have analyzed the effect of multi-wavelength selection in white-light interferometer on the visibility of the adjacent side fringes to central fringe. Selection rules of two and three wavelengths with short coherent length light sources, as well as some numerical simulation examples, are given. The results of this article are helpful in design of white-light interferometer.
出处 《量子电子学报》 CAS CSCD 北大核心 2001年第4期293-296,共4页 Chinese Journal of Quantum Electronics
关键词 多波长 波长值优化选择 白光干涉仪 multi-wavelength optimum wavelength selection white-light interferometer
  • 相关文献

参考文献2

  • 1Wang D N,Appl Opt,1994年,33卷,7326页
  • 2Rao Y J,Opt Lett,1993年,18卷,462页

同被引文献13

  • 1陈慧芳,严惠民,施柏煊.白光干涉法测量金属箔厚度[J].仪器仪表学报,2003,24(z2):19-20. 被引量:5
  • 2陈计金.非接触白光干涉法测量圆柱筒壁厚[J].仪器仪表学报,1994,15(1):94-96. 被引量:3
  • 3KINO G S, CHIM S C. The Mirau correlation microscope [J]. Appl. Opt, 1990,29(26):3775-3783.
  • 4SCHMIT J, OLSZAK A. High-precision shape measurement by white-light interferometry with real-time scanner correction[J]. Appl. Opt, 2002,41 ( 26 ) :5943- 5950.
  • 5KIM S W, KIM G H. Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry[J]. Appl. Opt, 1999,38(28) :5968- 5973.
  • 6WANG D N, NING Y N, GRATFAN K Y V. Optimized multi-wavelength combination sources for intefferometric use [ J ]. Applied Optics, 1994,33 ( 31 ) :7326-7333.
  • 7RAO Y J, NING Y N, JACKSON D A. Synthesized source for white-light sensing system [ J ]. Opt. Lett., 1993,18 ( 6 ) :462 -464.
  • 8BORN M, WOLF E. Principles of optics [ M ]. UK : Cambridge University Press, 2002.
  • 9HE Z, HOTATE K. Distributed photonic sensing with synthesized optical coherence function[ J]. Proc. SPIE, 2005,5952:59520J. 1-59520J. 15.
  • 10Deck L, de Groot P. High-speed noncontact profiler based on scanning white-light interferometry[J]. Applied Optics,1994,33(31):7334-7338.

引证文献2

二级引证文献6

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部